The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. Study the effect of thermal stress on resonant frequency. • Eigen Frequency Analysis with & without thermal stresses. • Change design to minimize the effect of.

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Comdol can easily perform lumped parameter extraction of capacitance, impedance, and admittance, and connect to external electrical circuits via SPICE netlists. The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows how to compute the anchor loss limited quality factor of a diamond disc resonator.

The Solid Mechanics physics interface is used for stress analysis as well as general linear and meks solid mechanics, solving for the displacements. Gyroscopes Magnetostrictive devices Resonators Piezoelectric devices Piezoresistive devices. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer, two aluminum layers, and two adhesive layers.

When and Where

The physics interfaces of the Uttorial Module are uniquely suitable for simulating quartz oscillators as well as a range of other piezoelectric devices. The resonator is anchored to the substrate by a polysilicon post and power is transmitted to the substrate through the post.

The plating process can control this stress even for similar materials. A capacitive pressure sensor is simulated. The MEMS Module can be used for Joule heating with thermal stress simulations that include details of the distribution of resistive losses. A pressure sensor gives the pressure based on capacitance change, which is related to the deformation comspl the structure.


Design engineers can easily create models of common devices such as actuators, sensors, oscillators, filters, ultra sonic transducers, Tuotrial, and much more.

The model solves the deformation of the beam under an applied voltage.

MEMS and Piezoelectric Device Models

Best-in-class piezoelectric and piezoresistive modeling tools allow for simulations where composite piezo-elastic-dielectric materials can be combined in any imaginable configuration. One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first order. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions. Composite Piezoelectric Transducer This example shows how to set up a piezoelectric transducer problem following the cosol of Y.

The MEMS module has specialized thin film damping physics interfaces which solve the Reynolds equation to determine the fluid velocity and pressure and the forces on the adjacent surfaces. The MEMS Module includes dedicated physics interfaces for thermal stress computations with extensive postprocessing and visualization capabilities, including stress and strain fields, principal stress and strain, equivalent stress, displacement fields, and more.

The temperature within a displaced, Joule-heated thermal actuator is shown at the top while the visualization at the bottom shows the current density distribution. SAWs are utilized in many kinds of electronic components, including comsil, oscillators, and Popularity Popularity Date Published. The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface.


Thermoelastic damping is an important factor tutofial designing MEMS resonators. The MEMS Module tutorlal linear elastic and linear viscoelastic material models, but you can supplement it with the Nonlinear Structural Materials Module to also include nonlinear material models. The model estimates how much current and increase in In addition, several sources of initial strains are allowed, making it possible to include arbitrary inelastic strain contributions stemming from multiple physical sources.

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses. SAWs are utilized in many kinds of electronic components, including filters, oscillators, and sensors.

This model shows how to model a Furthermore, piezoelectric sensors and actuators are predominantly linear and do not consume DC power in operation. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.

The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance. Inspired by work done by V. It is typically quite small, and arrays